ETCHING STUDIES ON QUARTZ SURFACES

被引：5

作者：

BRAUER, K

MULLER, E

机构：

来源：

CRYSTAL RESEARCH AND TECHNOLOGY | 1984年 / 19卷 / 11期

关键词：

D O I：

10.1002/crat.2170191127

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：K101 / K104

页数：4

共 14 条

[1] EPITAXIAL DEPOSITION OF SILICON ON QUARTZ [J].

BICKNELL, RW ;

STIRLAND, DJ ;

CHARIG, JM ;

JOYCE, BA .

PHILOSOPHICAL MAGAZINE, 1964, 9 (102) :965-&

[2]

BRAUER K, 1979, THESIS JENA

[3] AES STUDY OF THE LOW-PRESSURE OXIDATION OF SI(100) - ELECTRON-BEAM EFFECTS [J].

CARRIERE, B ;

CHOUIYAKH, A ;

LANG, B .

SURFACE SCIENCE, 1983, 126 (1-3) :495-501

[4]

CARRIERE B, 1979, SILICATES IND, V3, P85

[5] XPS STUDY OF ALPHA-QUARTZ SURFACE [J].

GORLICH, E ;

HABER, J ;

STOCH, A ;

STOCH, J .

JOURNAL OF SOLID STATE CHEMISTRY, 1980, 33 (01) :121-124

[6] ANOMALOUS AMORPHOUS SIO2-FILMS [J].

HAUSER, JJ ;

PASTEUR, GA ;

STAUDINGER, A ;

HUTTON, RS .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1981, 46 (01) :59-70

[7]

JUNGHANS C, 1981, THESIS JENA

[8]

KIRSCHNER J, 1975, IPP919 MAX PLANCK I

[9] CORE AND VALENCE ELECTRON EXCITATIONS OF AMORPHOUS SILICON-OXIDE AND SILICON-NITRIDE STUDIED BY LOW-ENERGY ELECTRON LOSS SPECTROSCOPY [J].

LIESKE, N ;

HEZEL, R .

THIN SOLID FILMS, 1979, 61 (02) :217-228

[10] ELECTRON-STIMULATED OXIDATION OF SILICON SURFACES [J].

MUNOZ, MC ;

SACEDON, JL .

JOURNAL OF CHEMICAL PHYSICS, 1981, 74 (08) :4693-4700

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