EPITAXIAL DEPOSITION OF SILICON ON QUARTZ

[1] BASSETT GA, 1959, P INT C STRUCT PROP, P11

[2] BASSETT GA, 1960, P EUR REG C ELECTRON, P270

[3] CRYSTALLOGRAPHIC IMPERFECTIONS IN EPITAXIALLY GROWN SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1962, 33 (11) : 3281 - &

[4] STUDY OF BACKGROUND STRUCTURE IN PLATINUM CARBON SHADOWING DEPOSITS [J]. BRITISH JOURNAL OF APPLIED PHYSICS, 1960, 11 (11): : 506 - 509

[5] EPITAXIAL GROWTH OF SILICON BY HYDROGEN REDUCTION OF SIHCL3 ONTO SILICON SUBSTRATES [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1962, 109 (10) : 957 - 962

[6] GROWTH MECHANISM AND DEFECT STRUCTURES IN EPITAXIAL SILICON [J]. PHILOSOPHICAL MAGAZINE, 1962, 7 (83): : 1847 - &

[7] STRUCTURE AND ORIGIN OF STACKING FAULTS IN EPITAXIAL SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1963, 34 (02) : 406 - &

[8] JACOBS MH, 1962, 5 INT C EL MICR

[9] EPITAXIAL DEPOSITION OF SILICON ON QUARTZ [J]. SOLID STATE COMMUNICATIONS, 1963, 1 (05) : 107 - 108

[10] DIFFUSION OF OXYGEN IN SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1959, 30 (11) : 1627 - 1630

[1] BASSETT GA, 1959, P INT C STRUCT PROP, P11

[2] BASSETT GA, 1960, P EUR REG C ELECTRON, P270

[3] CRYSTALLOGRAPHIC IMPERFECTIONS IN EPITAXIALLY GROWN SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1962, 33 (11) : 3281 - &

[4] STUDY OF BACKGROUND STRUCTURE IN PLATINUM CARBON SHADOWING DEPOSITS [J]. BRITISH JOURNAL OF APPLIED PHYSICS, 1960, 11 (11): : 506 - 509

[5] EPITAXIAL GROWTH OF SILICON BY HYDROGEN REDUCTION OF SIHCL3 ONTO SILICON SUBSTRATES [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1962, 109 (10) : 957 - 962

[6] GROWTH MECHANISM AND DEFECT STRUCTURES IN EPITAXIAL SILICON [J]. PHILOSOPHICAL MAGAZINE, 1962, 7 (83): : 1847 - &

[7] STRUCTURE AND ORIGIN OF STACKING FAULTS IN EPITAXIAL SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1963, 34 (02) : 406 - &

[8] JACOBS MH, 1962, 5 INT C EL MICR

[9] EPITAXIAL DEPOSITION OF SILICON ON QUARTZ [J]. SOLID STATE COMMUNICATIONS, 1963, 1 (05) : 107 - 108

[10] DIFFUSION OF OXYGEN IN SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1959, 30 (11) : 1627 - 1630