HIGH-RESOLUTION ELECTRON-MICROSCOPY OF PLANAR INVERSION DOMAIN BOUNDARIES IN ALUMINUM NITRIDE

被引:18
作者
MCCARTNEY, MR [1 ]
YOUNGMAN, RA [1 ]
TELLER, RG [1 ]
机构
[1] BP RES,CLEVELAND,OH 44128
基金
美国国家科学基金会;
关键词
D O I
10.1016/0304-3991(92)90126-5
中图分类号
TH742 [显微镜];
学科分类号
摘要
High-resolution electron microscopy has been utilized to elucidate the structural nature of oxygen-containing planar inversion domain boundaries in aluminum nitride. A model for this defect is proposed which incorporates the necessary structural elements needed to describe the entire AlN-Al2O3 system. Image simulations of the proposed defect structure, for a range of imaging conditions, are in excellent agreement with experimental micrographs and provide substantial evidence for the validity of the proposed model.
引用
收藏
页码:291 / 299
页数:9
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