ELECTRONIC-STRUCTURE OF AN AIN FILM PRODUCED BY ION-IMPLANTATION, STUDIED BY ELECTRON-SPECTROSCOPY

被引：57

作者：

GAUTIER, M

DURAUD, JP

LEGRESSUS, C

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 02期

关键词：

D O I：

10.1063/1.338207

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：574 / 580

页数：7

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