A SEMI-EMPIRICAL FORMULA FOR THE ENERGY-DEPENDENCE OF THE SPUTTERING YIELD

被引：83

作者：

MATSUNAMI, N ^{[1
]}

YAMAMURA, Y ^{[1
]}

ITIKAWA, Y ^{[1
]}

ITOH, N ^{[1
]}

KAZUMATA, Y ^{[1
]}

MIYAGAWA, S ^{[1
]}

MORITA, K ^{[1
]}

SHIMIZU, R ^{[1
]}

机构：

[1] NAGOYA UNIV,INST PLASMA PHYS,CHIKUSA KU,NAGOYA,AICHI 464,JAPAN

来源：

RADIATION EFFECTS LETTERS | 1980年 / 57卷 / 1-2期

关键词：

D O I：

10.1080/01422448008218676

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

引用

页码：15 / 21

页数：7

共 14 条

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[2] SURFACE EROSION FROM PLASMA MATERIALS INTERACTION
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[J]. JOURNAL OF NUCLEAR MATERIALS, 1979, 85-6 (DEC) : 1047 - 1061
[3] BOHDANSKY J, UNPUBLISHED
[4] GSCHNEIDNER KA, 1964, SOLID STATE PHYS, V16, P275
[5] SPUTTERING THRESHOLDS
HARRISON, DE
MAGNUSON, GD
[J]. PHYSICAL REVIEW, 1961, 122 (05): : 1421 - &
[6] LINDHARD J, 1968, MAT FYS MEDD DAN VID, V36
[7] BEHAVIOR OF SURFACES UNDER ION-BOMBARDMENT
MCCRACKEN, GM
[J]. REPORTS ON PROGRESS IN PHYSICS, 1975, 38 (02) : 241 - &
[8] SPUTTERING - REVIEW OF SOME RECENT EXPERIMENTAL AND THEORETICAL ASPECTS
OECHSNER, H
[J]. APPLIED PHYSICS, 1975, 8 (03): : 185 - 198
[9] SCHOTT HE, 1966, MAT FYS MEDD VID SEL, V35
[10] THEORY OF SPUTTERING .I. SPUTTERING YIELD OF AMORPHOUS AND POLYCRYSTALLINE TARGETS
SIGMUND, P
[J]. PHYSICAL REVIEW, 1969, 184 (02): : 383 - +