AN INSITU SPECTROSCOPIC EROSION YIELD MEASUREMENT WITH APPLICATIONS TO SPUTTERING AND SURFACE-MORPHOLOGY ALTERATIONS

被引：9

作者：

LEUNG, WK ^{[1
]}

HIROOKA, Y ^{[1
]}

CONN, RW ^{[1
]}

GOEBEL, DM ^{[1
]}

LABOMBARD, B ^{[1
]}

NYGREN, R ^{[1
]}

机构：

[1] UNIV CALIF LOS ANGELES,INST PLASMA & FUS RES,LOS ANGELES,CA 90024

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 01期

关键词：

D O I：

10.1116/1.575761

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：21 / 26

页数：6

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