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THERMAL REMOVAL OF SURFACE CARBON FROM GAAS SUBSTRATE USED IN MOLECULAR-BEAM EPITAXY
被引:9
作者
:
CHANG, CA
论文数:
0
引用数:
0
h-index:
0
CHANG, CA
机构
:
来源
:
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY
|
1982年
/ 21卷
/ 02期
关键词
:
CARBON;
-;
ETCHING;
D O I
:
10.1116/1.571809
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
引用
收藏
页码:663 / 665
页数:3
相关论文
共 4 条
[1]
AUGER ANALYSIS OF SILICON THIN-FILMS DEPOSITED ON CARBON AT HIGH-TEMPERATURES
CHANG, CA
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV CALIF,INORG MAT RES DIV,LAWRENCE BERKELEY LAB,BERKELEY,CA 94720
UNIV CALIF,INORG MAT RES DIV,LAWRENCE BERKELEY LAB,BERKELEY,CA 94720
CHANG, CA
SIEKHAUS, WJ
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV CALIF,INORG MAT RES DIV,LAWRENCE BERKELEY LAB,BERKELEY,CA 94720
UNIV CALIF,INORG MAT RES DIV,LAWRENCE BERKELEY LAB,BERKELEY,CA 94720
SIEKHAUS, WJ
[J].
JOURNAL OF APPLIED PHYSICS,
1975,
46
(08)
: 3402
-
3407
[2]
EFFECT OF SUBSTRATE SURFACE-TREATMENT IN MOLECULAR-BEAM EPITAXY ON THE VERTICAL ELECTRONIC TRANSPORT THROUGH THE FILM-SUBSTRATE INTERFACE
CHANG, CA
论文数:
0
引用数:
0
h-index:
0
CHANG, CA
HEIBLUM, M
论文数:
0
引用数:
0
h-index:
0
HEIBLUM, M
LUDEKE, R
论文数:
0
引用数:
0
h-index:
0
LUDEKE, R
NATHAN, MI
论文数:
0
引用数:
0
h-index:
0
NATHAN, MI
[J].
APPLIED PHYSICS LETTERS,
1981,
39
(03)
: 229
-
231
[3]
STUDIES BY CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPE OF INAS GROWN BY MOLECULAR-BEAM EPITAXY ON GAAS SUBSTRATES
CHANG, CA
论文数:
0
引用数:
0
h-index:
0
CHANG, CA
SERRANO, CM
论文数:
0
引用数:
0
h-index:
0
SERRANO, CM
CHANG, LL
论文数:
0
引用数:
0
h-index:
0
CHANG, LL
ESAKI, L
论文数:
0
引用数:
0
h-index:
0
ESAKI, L
[J].
APPLIED PHYSICS LETTERS,
1980,
37
(06)
: 538
-
540
[4]
Cho A. Y., 1975, Progress in Solid State Chemistry, V10, P157, DOI 10.1016/0079-6786(75)90005-9
←
1
→
共 4 条
[1]
AUGER ANALYSIS OF SILICON THIN-FILMS DEPOSITED ON CARBON AT HIGH-TEMPERATURES
CHANG, CA
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV CALIF,INORG MAT RES DIV,LAWRENCE BERKELEY LAB,BERKELEY,CA 94720
UNIV CALIF,INORG MAT RES DIV,LAWRENCE BERKELEY LAB,BERKELEY,CA 94720
CHANG, CA
SIEKHAUS, WJ
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV CALIF,INORG MAT RES DIV,LAWRENCE BERKELEY LAB,BERKELEY,CA 94720
UNIV CALIF,INORG MAT RES DIV,LAWRENCE BERKELEY LAB,BERKELEY,CA 94720
SIEKHAUS, WJ
[J].
JOURNAL OF APPLIED PHYSICS,
1975,
46
(08)
: 3402
-
3407
[2]
EFFECT OF SUBSTRATE SURFACE-TREATMENT IN MOLECULAR-BEAM EPITAXY ON THE VERTICAL ELECTRONIC TRANSPORT THROUGH THE FILM-SUBSTRATE INTERFACE
CHANG, CA
论文数:
0
引用数:
0
h-index:
0
CHANG, CA
HEIBLUM, M
论文数:
0
引用数:
0
h-index:
0
HEIBLUM, M
LUDEKE, R
论文数:
0
引用数:
0
h-index:
0
LUDEKE, R
NATHAN, MI
论文数:
0
引用数:
0
h-index:
0
NATHAN, MI
[J].
APPLIED PHYSICS LETTERS,
1981,
39
(03)
: 229
-
231
[3]
STUDIES BY CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPE OF INAS GROWN BY MOLECULAR-BEAM EPITAXY ON GAAS SUBSTRATES
CHANG, CA
论文数:
0
引用数:
0
h-index:
0
CHANG, CA
SERRANO, CM
论文数:
0
引用数:
0
h-index:
0
SERRANO, CM
CHANG, LL
论文数:
0
引用数:
0
h-index:
0
CHANG, LL
ESAKI, L
论文数:
0
引用数:
0
h-index:
0
ESAKI, L
[J].
APPLIED PHYSICS LETTERS,
1980,
37
(06)
: 538
-
540
[4]
Cho A. Y., 1975, Progress in Solid State Chemistry, V10, P157, DOI 10.1016/0079-6786(75)90005-9
←
1
→