STRUCTURAL COMPOSITION OF POLYMERS RELATIVE TO THEIR PLASMA ETCH CHARACTERISTICS

被引：71

作者：

PEDERSON, LA

机构：

来源：

关键词：

D O I：

10.1149/1.2123758

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：205 / 208

页数：4

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