EXCITED-STATES OF PLASMAS FOR STEEL SURFACE NITRIDING AND TIN DEPOSITION

被引：20

作者：

RICARD, A ^{[1
]}

HENRION, G ^{[1
]}

MICHEL, H ^{[1
]}

GANTOIS, M ^{[1
]}

机构：

[1] ECOLE MINES,CNRS,GENIE MET LAB,UA 159,F-54042 NANCY,FRANCE

来源：

PURE AND APPLIED CHEMISTRY | 1988年 / 60卷 / 05期

关键词：

D O I：

10.1351/pac198860050747

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：747 / 751

页数：5

共 12 条

[1]

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[2]

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[5] VIBRATIONAL-EXCITATION, HARPOONING, AND STICKING IN MOLECULE SURFACE COLLISIONS [J].

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NORSKOV, JK .

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[6]

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[7]

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[8]

MICHEL H, 1984, HEAT TREATMENT, V84

[9] EMISSION-SPECTROSCOPY STUDY OF N-2-H-2 GLOW-DISCHARGE FOR METAL-SURFACE NITRIDING [J].

PETITJEAN, L ;

RICARD, A .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1984, 17 (05) :919-929

[10] ANALYSIS OF A REACTIVE SPUTTER ION PLATING DISCHARGE FOR TIN DEPOSITION USING OPTICAL-EMISSION SPECTROSCOPY [J].

RICARD, A ;

MICHEL, H ;

JACQUOT, P ;

GANTOIS, M .

THIN SOLID FILMS, 1985, 124 (01) :67-73

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