PREPARATION AND PROPERTIES OF RF SPUTTERED FILMS OF ZNO AS AN ULTRASONIC PRANSDUCER

被引：18

作者：

INABA, R

ISHIGURO, T

MIKOSHIBA, N

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1971年 / 10卷 / 11期

关键词：

D O I：

10.1143/JJAP.10.1493

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1493 / +

页数：1

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