NOVEL MECHANISM FOR HIGH-SPEED GROWTH OF TRANSPARENT AND CONDUCTING TIN OXIDE THIN-FILMS BY SPRAY-PYROLYSIS

被引：69

作者：

RAO, LK

VINNI, V

机构：

[1] Instrumentation and Services Unit, Indian Institute of Science

来源：

APPLIED PHYSICS LETTERS | 1993年 / 63卷 / 05期

关键词：

D O I：

10.1063/1.109964

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A novel mechanism is proposed for efficient manipulation of transport forces acting on the droplets during spray pyrolytic deposition of thin films. A ''burst mode'' technique of spraying is used to adjust the deposition conditions so as to transport the droplets under the new mechanism. Transparent, conducting thin films of undoped tin oxide prepared by this method showed significant improvement in growth rate. The films are found to be of fairly good quality with optical transmission of 82% and sheet resistance of 35 OMEGA/square. The films are chemically homogeneous and grow preferentially along [200] direction.

引用

页码：608 / 610

页数：3

共 14 条

[1] ON THE CHLORINE CONTENT IN CHEMICALLY SPRAYED TIN OXIDE-FILMS - A QUANTITATIVE-ANALYSIS [J].