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FORMATION AND SURFACE-ACOUSTIC-WAVE PROPERTIES OF LINBO3/ALN/SAPPHIRE

被引：12
作者：
SHIBATA, Y
KANNO, Y
KAYA, K
KANAI, M
KAWAI, T
机构：
[1] ASAHI CHEM IND CORP LTD, MAT & ELECTR DEVICES LAB, FUJI 416, SHIZUOKA, JAPAN
[2] OSAKA UNIV, INST SCI & IND RES, IBARAKI, OSAKA 567, JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1995年 / 34卷 / 3A期
关键词：
PULSED LASER DEPOSITION; AIN; LINBO3; THIN FILMS; SURFACE ACOUSTIC WAVE (SAW) PROPERTIES; THEORETICAL CALCULATION;
D O I：
10.1143/JJAP.34.L320
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Thin films of LiNbO3 have been formed on AlN films (AlN/sapphire) by pulsed laser deposition. The epitaxial growth of LiNbO3 films is confirmed by X-ray pole figure analysis. Theoretical calculation of surface acoustic a ave (SAW) properties has been performed for LiNbO3/AlN/sapphire. Preliminary results of experimental SAW properties have been shown.
引用
收藏
页码：L320 / L322
页数：3
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