SIMULTANEOUS DETERMINATION OF DISPERSION-RELATION AND DEPTH PROFILE OF THORIUM FLUORIDE THIN-FILM BY SPECTROSCOPIC ELLIPSOMETRY

被引：40

作者：

KIM, SY

VEDAM, K

机构：

[1] Pennsylvania State Univ, United States

来源：

关键词：

D O I：

10.1016/0040-6090(88)90394-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：325 / 334

页数：10

共 26 条

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[9] PROPER CHOICE OF THE ERROR FUNCTION IN MODELING SPECTROELLIPSOMETRIC DATA
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[J]. APPLIED OPTICS, 1986, 25 (12): : 2013 - 2021
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