PROPER CHOICE OF THE ERROR FUNCTION IN MODELING SPECTROELLIPSOMETRIC DATA

被引：37

作者：

KIM, SY

VEDAM, K

机构：

来源：

APPLIED OPTICS | 1986年 / 25卷 / 12期

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D O I：

10.1364/AO.25.002013

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

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页码：2013 / 2021

页数：9

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