DIELECTRIC FUNCTION AND SURFACE MICROROUGHNESS MEASUREMENTS OF INSB BY SPECTROSCOPIC ELLIPSOMETRY

被引：83

作者：

ASPNES, DE

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 05期

关键词：

D O I：

10.1116/1.570590

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1057 / 1060

页数：4

共 17 条

[1] Aspnes D. E., 1976, OPTICAL PROPERTIES S, P799
[2] HIGH PRECISION SCANNING ELLIPSOMETER
ASPNES, DE
STUDNA, AA
[J]. APPLIED OPTICS, 1975, 14 (01): : 220 - 228
[3] INVESTIGATION OF EFFECTIVE-MEDIUM MODELS OF MICROSCOPIC SURFACE-ROUGHNESS BY SPECTROSCOPIC ELLIPSOMETRY
ASPNES, DE
THEETEN, JB
[J]. PHYSICAL REVIEW B, 1979, 20 (08): : 3292 - 3302
[4] EFFECTS OF COMPONENT OPTICAL-ACTIVITY IN DATA REDUCTION AND CALIBRATION OF ROTATING-ANALYZER ELLIPSOMETERS
ASPNES, DE
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (06) : 812 - 819
[5] METHODS FOR DRIFT STABILIZATION AND PHOTOMULTIPLIER LINEARIZATION FOR PHOTOMETRIC ELLIPSOMETERS AND POLARIMETERS
ASPNES, DE
STUDNA, AA
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1978, 49 (03) : 291 - 297
[6] ASPNES DE, 1977, OPTICAL POLARIMETRY, V112, P62
[7] ASPNES DE, 1980, P C NONTRADITIONAL T
[8] ASPNES DE, 1980, 4TH P INT C ELL
[9] ASPNES DE, UNPUBLISHED
[10] Azzam RMA, 1977, ELLIPSOMETRY POLARIZ