DIELECTRIC FUNCTION AND SURFACE MICROROUGHNESS MEASUREMENTS OF INSB BY SPECTROSCOPIC ELLIPSOMETRY

[11] CHANG CK, 1977, J HETEROCYCLIC CHEM, V14, P943, DOI 10.1116/1.569397

[12] ANODIC-OXIDATION OF GAAS IN MIXED SOLUTIONS OF GLYCOL AND WATER [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (05) : 713 - 723

[13] HAUGE PS, 1980, 4TH P INT C ELL

[14] MATTAUSCH HJ, UNPUBLISHED

[15] Philipp HR, 1967, SEMICOND SEMIMETALS, V3, P93, DOI [10.1016/S0080-8784(08)60316-6, DOI 10.1016/S0080-8784(08)60316-6]

[16] CHEMICAL ETCHING OF SILICON .4. ETCHING TECHNOLOGY [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (12) : 1903 - 1909

[17] CORRELATION BETWEEN COMPOSITION PROFILE AND ELECTRICAL-CONDUCTIVITY OF THERMAL AND ANODIC OXIDES OF INSB [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01): : 64 - 67

[11] CHANG CK, 1977, J HETEROCYCLIC CHEM, V14, P943, DOI 10.1116/1.569397

[12] ANODIC-OXIDATION OF GAAS IN MIXED SOLUTIONS OF GLYCOL AND WATER [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (05) : 713 - 723

[13] HAUGE PS, 1980, 4TH P INT C ELL

[14] MATTAUSCH HJ, UNPUBLISHED

[15] Philipp HR, 1967, SEMICOND SEMIMETALS, V3, P93, DOI [10.1016/S0080-8784(08)60316-6, DOI 10.1016/S0080-8784(08)60316-6]

[16] CHEMICAL ETCHING OF SILICON .4. ETCHING TECHNOLOGY [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (12) : 1903 - 1909

[17] CORRELATION BETWEEN COMPOSITION PROFILE AND ELECTRICAL-CONDUCTIVITY OF THERMAL AND ANODIC OXIDES OF INSB [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01): : 64 - 67