SPECTROSCOPIC ANALYSIS OF THE INTERFACE BETWEEN SI AND ITS THERMALLY GROWN OXIDE

被引：227

作者：

ASPNES, DE ^{[1
]}

THEETEN, JB ^{[1
]}

机构：

[1] LABS ELECTR & PHYS APPL,F-94450 LIMEIL BREVANNES,FRANCE

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1980年 / 127卷 / 06期

关键词：

D O I：

10.1149/1.2129899

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：1359 / 1365

页数：7

相关论文

共 32 条

[1] Aspnes D. E., 1976, OPTICAL PROPERTIES S, P799
[2] HIGH PRECISION SCANNING ELLIPSOMETER
ASPNES, DE
STUDNA, AA
[J]. APPLIED OPTICS, 1975, 14 (01): : 220 - 228
[3] INVESTIGATION OF EFFECTIVE-MEDIUM MODELS OF MICROSCOPIC SURFACE-ROUGHNESS BY SPECTROSCOPIC ELLIPSOMETRY
ASPNES, DE
THEETEN, JB
[J]. PHYSICAL REVIEW B, 1979, 20 (08): : 3292 - 3302
[4] NONDESTRUCTIVE CHARACTERIZATION OF INTERFACE LAYERS BETWEEN SI OR GAAS AND THEIR OXIDES BY SPECTROSCOPIC ELLIPSOMETRY
ASPNES, DE
THEETEN, JB
CHANG, RPH
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (05): : 1374 - 1378
[5] DIELECTRIC FUNCTION OF SI-SIO2 AND SI-SI3N4 MIXTURES
ASPNES, DE
THEETEN, JB
[J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (07) : 4928 - 4935
[6] EFFECTS OF COMPONENT OPTICAL-ACTIVITY IN DATA REDUCTION AND CALIBRATION OF ROTATING-ANALYZER ELLIPSOMETERS
ASPNES, DE
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (06) : 812 - 819
[7] METHODS FOR DRIFT STABILIZATION AND PHOTOMULTIPLIER LINEARIZATION FOR PHOTOMETRIC ELLIPSOMETERS AND POLARIMETERS
ASPNES, DE
STUDNA, AA
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1978, 49 (03) : 291 - 297
[8] ASPNES DE, SURF SCI
[9] ASPNES DE, 1977, OPTICAL POLARIMETRY, V112, P62
[10] ASPNES DE, UNPUBLISHED

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