THE EFFECTS OF SURFACE-ROUGHNESS CHARACTERIZED BY FRACTAL GEOMETRY ON SPUTTERING

被引：101

作者：

RUZIC, DN

机构：

[1] Department of Nuclear Engineering, University of Illinois, Urbana, IL 61801

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1990年 / 47卷 / 02期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1016/0168-583X(90)90019-Q

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Fractal geometry has been added to the binary-collision TRIM computer code to simulate realistic atomic-scale surface roughness. This inclusion significantly affects TRIM sputtering yields and reflection coefficients at low energies (10s to 100s of eV) and non-normal angles of incidence. Results are shown and favorably compared to experiments for H and C sputtering of C as a function of angle, energy and fractal dimension. Energy and angular distributions of the sputtered and reflected particles as a function of fractal dimension are also shown. © 1990.

引用

页码：118 / 125

页数：8

共 18 条

[1]

ANDERSEN HH, 1981, SPUTTERING PARTICLE, pCH4

[2]

[Anonymous], 1973, SELECTED VALUES THER

[3] CHEMISTRY IN NONINTEGER DIMENSIONS BETWEEN 2 AND 3 .2. FRACTAL SURFACES OF ADSORBENTS [J].