PULSED-LASER ABLATION AND DEPOSITION OF SEMICONDUCTING THIN-FILMS - CHARACTERIZATION OF TRANSIENT SPECIES

被引:9
作者
GUIDONI, AG [1 ]
MELE, A [1 ]
PIZZELLA, G [1 ]
TEGHIL, R [1 ]
机构
[1] UNIV BASILICATA,DIPARTIMENTO CHIM,I-85100 POTENZA,ITALY
关键词
D O I
10.1016/0169-4332(93)90498-Z
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A study of laser-induced production and mass spectrometric analysis of ionized clusters from powder mixtures of the Group VI elements S, Se and Te and Cr, Fe, Ni, Cu, Ag, Zn, In and Cd is discussed. The binary systems Li2S, FeS, Ni2S, Ag2S, Ag2Te, ZnSe, CdS, CdSe and CdTe have also been investigated. The results show the formation of sequences of ionized products from laser ablation. Their relative stabilities are correlated to structure and reaction kinetics parameters.
引用
收藏
页码:161 / 168
页数:8
相关论文
共 20 条
[1]   TECHNIQUES FOR DEPOSITING DLC FILMS BY PULSED LASER ABLATION OF ORGANIC-SOLIDS [J].
ATHWAL, IS ;
MELE, A ;
OGRYZLO, EA .
DIAMOND AND RELATED MATERIALS, 1992, 1 (5-6) :731-734
[2]  
BALSOCH M, 1989, APPL PHYS LETT, V52, P197
[3]   ULTRAVIOLET PHOTOELECTRON STUDIES OF THE MOLECULES SE5, SE6, SE7 AND SE8 WITH RELEVANCE TO THEIR GEOMETRICAL STRUCTURE [J].
BECKER, J ;
RADEMANN, K ;
HENSEL, F .
ZEITSCHRIFT FUR PHYSIK D-ATOMS MOLECULES AND CLUSTERS, 1991, 19 (1-4) :229-231
[4]  
DEHEER WA, 1987, SOLID STATE PHYS, V40, P93
[5]   METAL CARBIDE CLUSTERS FORMED BY LASER ABLATION OF METAL OXIDE-GRAPHITE SYSTEMS [J].
GUIDONI, AG ;
MELE, A ;
PIZZELLA, G ;
TEGHIL, R .
ZEITSCHRIFT FUR PHYSIK D-ATOMS MOLECULES AND CLUSTERS, 1991, 20 (1-4) :89-91
[6]  
GUIDONI AG, 1991, HIGH TEMPERATURE SUP, P451
[7]  
GUIDONI AG, 1991, LASER CHEM, V11, P205
[8]  
John P., 1987, Chemistry of the semiconductor industry, P98
[9]  
KELLER SP, 1980, HDB SEMICONDUCTORS
[10]  
LINEMAN DN, 1989, J PHYS CHEM-US, V93, P5026