TECHNIQUES FOR DEPOSITING DLC FILMS BY PULSED LASER ABLATION OF ORGANIC-SOLIDS

被引:20
作者
ATHWAL, IS
MELE, A
OGRYZLO, EA
机构
[1] UNIV BRITISH COLUMBIA, DEPT CHEM, VANCOUVER V6T 1Z1, BC, CANADA
[2] UNIV ROME LA SAPIENZA, DEPT CHEM, I-00185 ROME, ITALY
关键词
D O I
10.1016/0925-9635(92)90199-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Two methods of forming diamond-like carbon films by the ablation of chrysene, violanthrone, polymethylmethacrylate, and fullerene are described. The relative effectiveness of the two techniques is compared. Deposition rates with different target materials are presented and the films formed are tested for hardness. © 1992.
引用
收藏
页码:731 / 734
页数:4
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