DEPOSITION OF DIAMOND-LIKE FILMS BY LASER ABLATION

被引：11

作者：

MEHTA, BR ^{[1
]}

OGRYZLO, EA ^{[1
]}

机构：

[1] UNIV BRITISH COLUMBIA,DEPT CHEM,VANCOUVER V6T 1Y6,BC,CANADA

来源：

SURFACE & COATINGS TECHNOLOGY | 1990年 / 43-4卷 / 1-3期

关键词：

D O I：

10.1016/0257-8972(90)90062-H

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Diamond-like carbon films were grown by laser ablation of graphite and Lucite targets with a KrF excimer laser. The films were analysed using scanning electron microscopy, Auger spectroscopy and Raman spectroscopy. The use of Lucite targets results in higher and more constant growth rates as well as the absence of "splashing", which is observed to introduce structural defects in the growing film when graphite is used as a target. Auger and Raman analyses show the presence of diamond-like phases in these films.

引用

页码：80 / 87

页数：8

共 10 条

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