DIAMOND-LIKE CARBON-FILMS PREPARED BY PULSED-LASER EVAPORATION

被引:107
作者
SATO, T [1 ]
FURUNO, S [1 ]
IGUCHI, S [1 ]
HANABUSA, M [1 ]
机构
[1] TOYOTA MOTOR CORP,HIGASHIFUJI TECH CTR,MISHU KU,SHIZUOKA 41011,JAPAN
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1988年 / 45卷 / 04期
关键词
D O I
10.1007/BF00617942
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:355 / 360
页数:6
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