AMORPHOUS-CARBON FILMS PREPARED BY PHOTO-CVD FROM ACETYLENE

被引：18

作者：

DANNO, M

HANABUSA, M

机构：

来源：

MATERIALS LETTERS | 1986年 / 4卷 / 5-7期

关键词：

D O I：

10.1016/0167-577X(86)90019-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：261 / 264

页数：4

共 17 条

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[9] PREPARATION OF SP3-RICH AMORPHOUS-CARBON FILM BY HYDROGEN GAS REACTIVE RF-SPUTTERING OF GRAPHITE, AND ITS PROPERTIES [J].

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[10] THE DEVELOPMENT OF DIAMOND-LIKE (I-CARBON) THIN-FILMS AS ANTI-REFLECTING COATINGS FOR SILICON SOLAR-CELLS [J].

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