PREPARATION OF SP3-RICH AMORPHOUS-CARBON FILM BY HYDROGEN GAS REACTIVE RF-SPUTTERING OF GRAPHITE, AND ITS PROPERTIES

被引：52

作者：

MIYASATO, T ^{[1
]}

KAWAKAMI, Y ^{[1
]}

KAWANO, T ^{[1
]}

HIRAKI, A ^{[1
]}

机构：

[1] OSAKA UNIV,DEPT ELECT ENGN,SUITA,OSAKA 565,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1984年 / 23卷 / 04期

关键词：

D O I：

10.1143/JJAP.23.L234

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L234 / L237

页数：4

共 10 条

[1] DISCHLER B, 1983, APPL PHYS LETT, V42, P686
[2] BRILLOUIN-SCATTERING IN DIAMOND
GRIMSDITCH, MH
RAMDAS, AK
[J]. PHYSICAL REVIEW B, 1975, 11 (08): : 3139 - 3148
[3] TETRAHEDRAL CARBON-FILM BY HYDROGEN GAS REACTIVE RF-SPUTTERING OF GRAPHITE ONTO LOW-TEMPERATURE SUBSTRATE
HIRAKI, A
KAWANO, T
KAWAKAMI, Y
HAYASHI, M
[J]. SOLID STATE COMMUNICATIONS, 1984, 50 (08) : 713 - 716
[4] HYDROGENATED CRYSTALLINE SILICON FABRICATED AT LOW-SUBSTRATE TEMPERATURES BY REACTIVE SPUTTERING IN HE-H2 ATMOSPHERE
IMURA, T
MOGI, K
HIRAKI, A
NAKASHIMA, S
MITSUISHI, A
[J]. SOLID STATE COMMUNICATIONS, 1981, 40 (02) : 161 - 164
[5] SIDEBANDS IN THE LUMINESCENCE SPECTRA OF AMORPHOUS HYDROGENATED CARBON
LIN, S
FELDMAN, BJ
[J]. PHYSICAL REVIEW LETTERS, 1982, 48 (12) : 829 - 831
[6] VAPOR-DEPOSITION OF DIAMOND PARTICLES FROM METHANE
MATSUMOTO, S
SATO, Y
KAMO, M
SETAKA, N
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1982, 21 (04): : L183 - L185
[7] RAMAN EFFICIENCY MEASUREMENTS OF GRAPHITE
WADA, N
SOLIN, SA
[J]. PHYSICA B & C, 1981, 105 (1-3): : 353 - 356
[8] DIAMOND-LIKE 3-FOLD COORDINATED AMORPHOUS-CARBON
WADA, N
GACZI, PJ
SOLIN, SA
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) : 543 - 548
[9] WADA N, 1980, J NON CRYS SOLIDS, V36
[10] 1962, Patent No. 30301878