DIAMOND-LIKE CARBON-FILMS PREPARED BY PULSED-LASER EVAPORATION

被引:107
作者
SATO, T [1 ]
FURUNO, S [1 ]
IGUCHI, S [1 ]
HANABUSA, M [1 ]
机构
[1] TOYOTA MOTOR CORP,HIGASHIFUJI TECH CTR,MISHU KU,SHIZUOKA 41011,JAPAN
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1988年 / 45卷 / 04期
关键词
D O I
10.1007/BF00617942
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:355 / 360
页数:6
相关论文
共 22 条
[11]  
KANEOKA T, 1987, 8TH P INT S PLASM CH, P1566
[12]   SYNTHESIS OF DIAMOND BY LASER-INDUCED CHEMICAL VAPOR-DEPOSITION [J].
KITAHAMA, K ;
HIRATA, K ;
NAKAMATSU, H ;
KAWAI, S ;
FUJIMORI, N ;
IMAI, T ;
YOSHINO, H ;
DOI, A .
APPLIED PHYSICS LETTERS, 1986, 49 (11) :634-635
[13]   PRESSURE-DEPENDENCE OF CARBON-FILM COATING BY A TOROIDAL METHANE DISCHARGE [J].
KOJIMA, H ;
KAKO, H ;
TERADA, M ;
SUGAI, H ;
OKUDA, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1985, 24 (11) :1432-1435
[14]   PREPARATION OF SP3-RICH AMORPHOUS-CARBON FILM BY HYDROGEN GAS REACTIVE RF-SPUTTERING OF GRAPHITE, AND ITS PROPERTIES [J].
MIYASATO, T ;
KAWAKAMI, Y ;
KAWANO, T ;
HIRAKI, A .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (04) :L234-L237
[15]   PREPARATION AND STRUCTURE OF CARBON-FILM DEPOSITED BY A MASS-SEPARATED C+ ION-BEAM [J].
MIYAZAWA, T ;
MISAWA, S ;
YOSHIDA, S ;
GONDA, S .
JOURNAL OF APPLIED PHYSICS, 1984, 55 (01) :188-193
[16]  
MORI T, 1984, J APPL PHYS, V55, P3276, DOI 10.1063/1.333385
[17]   DIAMONDLIKE CARBON-FILMS - OPTICAL-ABSORPTION, DIELECTRIC-PROPERTIES, AND HARDNESS DEPENDENCE ON DEPOSITION PARAMETERS [J].
NATARAJAN, V ;
LAMB, JD ;
WOOLLAM, JA ;
LIU, DC ;
GULINO, DA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03) :681-685
[18]   THERMAL-CONDUCTIVITY OF DIAMOND FILMS SYNTHESIZED BY MICROWAVE PLASMA CVD [J].
ONO, A ;
BABA, T ;
FUNAMOTO, H ;
NISHIKAWA, A .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (10) :L808-L810
[19]   DEPOSITION OF DIAMOND-LIKE CARBON-FILMS BY PULSED-LASER EVAPORATION [J].
SATO, T ;
FURUNO, S ;
IGUCHI, S ;
HANABUSA, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (09) :L1487-L1488
[20]   OPTICAL-CONSTANTS OF A HYDROGENATED AMORPHOUS-CARBON FILM [J].
SMITH, FW .
JOURNAL OF APPLIED PHYSICS, 1984, 55 (03) :764-771