SYNTHESIS OF DIAMOND BY LASER-INDUCED CHEMICAL VAPOR-DEPOSITION

被引：64

作者：

KITAHAMA, K ^{[1
]}

HIRATA, K ^{[1
]}

NAKAMATSU, H ^{[1
]}

KAWAI, S ^{[1
]}

FUJIMORI, N ^{[1
]}

IMAI, T ^{[1
]}

YOSHINO, H ^{[1
]}

DOI, A ^{[1
]}

机构：

[1] SUMITOMO ELECT IND LTD,ITAMI LABS,ITAMI 664,JAPAN

来源：

APPLIED PHYSICS LETTERS | 1986年 / 49卷 / 11期

关键词：

D O I：

10.1063/1.97063

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：634 / 635

页数：2

共 11 条

[1]

FOOD PD, 1973, CHEM PHYS LETT, V22, P439

[2] EPITAXIAL SYNTHESIS OF DIAMOND BY CARBON-ION DEPOSITION AT LOW-ENERGY [J].

FREEMAN, JH ;

TEMPLE, W ;

GARD, GA .

NATURE, 1978, 275 (5681) :634-635

[3] UV LASER PHOTOCHEMISTRY OF ACETYLENE AT 193NM [J].

IRION, MP ;

KOMPA, KL .

APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1982, 27 (04) :183-186

[4] DIAMOND SYNTHESIS FROM GAS-PHASE IN MICROWAVE PLASMA [J].

KAMO, M ;

SATO, Y ;

MATSUMOTO, S ;

SETAKA, N .

JOURNAL OF CRYSTAL GROWTH, 1983, 62 (03) :642-644

[5] GAS-PHASE SYNTHESIS OF DIAMOND IN MICROWAVE PLASMA [J].

KAMO, M ;

SATO, Y ;

SETAKA, N .

NIPPON KAGAKU KAISHI, 1984, (10) :1642-1647

[6] GROWTH OF DIAMOND PARTICLES FROM METHANE-HYDROGEN GAS [J].

MATSUMOTO, S ;

SATO, Y ;

TSUTSUMI, M ;

SETAKA, N .

JOURNAL OF MATERIALS SCIENCE, 1982, 17 (11) :3106-3112

[7]

MORI T, 1984, J APPL PHYS, V55, P3276, DOI 10.1063/1.333385

[8]

NAMBA Y, 1985, J VAC SCI TECHNOL A, V3, P1953

[9] LASER PHOTOLYSIS OF C2H2 AND CF3C2H AT 193 NM - PRODUCTION OF C2(D3PI-G) AND CH(ALPHA-DELTA2) AND THEIR QUENCHING BY XE [J].

OKABE, H ;

CODY, RJ ;

ALLEN, JE .

CHEMICAL PHYSICS, 1985, 92 (01) :67-73

[10] GROWTH OF DIAMOND THIN-FILMS BY ELECTRON ASSISTED CHEMICAL VAPOR-DEPOSITION [J].

SAWABE, A ;

INUZUKA, T .

APPLIED PHYSICS LETTERS, 1985, 46 (02) :146-147

← 1 2 →