MECHANICAL-PROPERTIES OF AND CRACKS AND WRINKLES IN VACUUM-DEPOSITED MGF2, CARBON AND BORON COATINGS

被引：53

作者：

KINBARA, A

BABA, S

MATUDA, N

TAKAMISAWA, K

机构：

来源：

THIN SOLID FILMS | 1981年 / 84卷 / 02期

关键词：

D O I：

10.1016/0040-6090(81)90470-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：205 / 212

页数：8

共 18 条

[1]

ALNAMI A, 1980, VIDE COUCHES MINCE S, V201, P336

[2]

[Anonymous], 1972, AIP HDB

[3] SPUTTERING YIELDS OF GRAPHITE AND CARBIDES AND THEIR POTENTIAL USE AS 1ST WALL MATERIALS [J].

BOHDANSKY, J ;

BAY, HL ;

OTTENBERGER, W .

JOURNAL OF NUCLEAR MATERIALS, 1978, 76-7 (1-2) :163-167

[4]

Bosnell J. R., 1970, Thin Solid Films, V6, P161, DOI 10.1016/0040-6090(70)90036-2

[5] ELECTRODE-LIMITED CONDUCTION IN AMORPHOUS BORON FILMS .1. IDC MEASUREMENTS [J].

CASERTA, G ;

SERRA, A .

THIN SOLID FILMS, 1974, 20 (01) :91-101

[6]

GUNTHER G, 1966, BASIC PROBLEMS THIN, P231

[7]

HOLLAND L, 1960, VACUUM DEPOSITION TH

[8] SELECTED MECHANICAL-PROPERTIES OF GOLD, SILVER, ALUMINUM AND GERMANIUM COATINGS [J].

KINBARA, A ;

BABA, S .

THIN SOLID FILMS, 1980, 72 (02) :211-221

[9]

KINBARA A, 1980, VIDE COUCHES MINCE S, V201, P323

[10] INTERNAL-STRESS, YOUNG MODULUS AND ADHESION ENERGY OF CARBON-FILMS ON GLASS SUBSTRATES [J].

MATUDA, N ;

BABA, S ;

KINBARA, A .

THIN SOLID FILMS, 1981, 81 (04) :301-305

← 1 2 →