Influence of nitrogen doping on different properties of a-C:H

被引:44
作者
Hauert, R
Glisenti, A
Metin, S
Goitia, J
Kaufman, JH
vanLoosdrecht, PHM
Kellock, AJ
Hoffmann, P
White, RL
Hermsmeier, BD
机构
[1] IBM CORP, DIV STORAGE SYST, SAN JOSE, CA 95193 USA
[2] SWISS FED LABS MAT TESTING & RES, CH-8600 DUBENDORF, SWITZERLAND
关键词
nitrogen; doping; amorphous materials; carbon;
D O I
10.1016/0040-6090(95)06824-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Amorphous hydrogenated carbon (a-C:H) exhibits outstanding properties such as high hardness, low mechanical wear and friction, high thermal conductivity, etc. These properties are irreversibly altered above 400 degrees C. Doping the a-C:H films with nitrogen revealed the possibility to continuously tune properties such as internal stress, hardness, electrical conductivity and surface energy. X-ray photoelectron spectroscopy has been used to analyze the chemical and structural modifications caused by the introduction of nitrogen into the films. An increased onset temperature of the thermal C-H bond decomposition in a-C:H films up to 600 degrees C (in vacuum) is observed. Hardness measurements on N-doped samples show an increase in thermal stability of the films, however, without ever reaching the hardness values obtained from the undoped a-C:H film.
引用
收藏
页码:22 / 29
页数:8
相关论文
共 46 条
  • [21] TREATMENT OF POLY(ETHER ETHER KETONE) (PEEK) SURFACES BY REMOTE PLASMA DISCHARGE - XPS INVESTIGATION OF THE AGING OF PLASMA-TREATED PEEK
    JAMA, C
    DESSAUX, O
    GOUDMAND, P
    GENGEMBRE, L
    GRIMBLOT, J
    [J]. SURFACE AND INTERFACE ANALYSIS, 1992, 18 (11) : 751 - 756
  • [22] KAHN AA, 1983, IEEE ELECTRON DEVICE, V4, P146
  • [23] THE INTRINSIC REDOX STATES IN POLYPYRROLE AND POLYANILINE - A COMPARATIVE-STUDY BY XPS
    KANG, ET
    NEOH, KG
    TAN, KL
    [J]. SURFACE AND INTERFACE ANALYSIS, 1992, 19 (1-12) : 33 - 37
  • [24] SYMMETRY-BREAKING IN NITROGEN-DOPED AMORPHOUS-CARBON - INFRARED OBSERVATION OF THE RAMAN-ACTIVE G-BANDS AND D-BANDS
    KAUFMAN, JH
    METIN, S
    SAPERSTEIN, DD
    [J]. PHYSICAL REVIEW B, 1989, 39 (18): : 13053 - 13060
  • [25] KRANTZ MC, 1993, P SOC PHOTO-OPT INS, V1857, P94, DOI 10.1117/12.148512
  • [26] EVALUATION OF THE SP2/SP3 RATIO IN AMORPHOUS-CARBON STRUCTURE BY XPS AND XAES
    LASCOVICH, JC
    GIORGI, R
    SCAGLIONE, S
    [J]. APPLIED SURFACE SCIENCE, 1991, 47 (01) : 17 - 21
  • [27] SURFACE MODIFICATION OF PET FILMS WITH RF PLASMA AND ADHESION OF IN-SITU EVAPORATED AL ON PET
    LE, QT
    PIREAUX, JJ
    VERBIST, JJ
    [J]. SURFACE AND INTERFACE ANALYSIS, 1994, 22 (1-12) : 224 - 229
  • [28] LETTINGTON AH, 1987, AMORPHOUS HYDROGENAT, P359
  • [29] Moulder J. F., 1992, HDB XRAY PHOTOELECTR
  • [30] OELHAFEN P, 1991, NATO ADV SCI I B-PHY, V266, P377