ANALYTICAL ELECTRON-MICROSCOPY AT THE ATOMIC LEVEL WITH PARALLEL ELECTRON-ENERGY LOSS SPECTROSCOPY

被引：15

作者：

BOUCHET, D ^{[1
]}

COLLIEX, C ^{[1
]}

FLORA, P ^{[1
]}

KRIVANEK, O ^{[1
]}

MORY, C ^{[1
]}

TENCE, M ^{[1
]}

机构：

[1] GATAN RES & DEV,6678 OWENS DR,PLEASANTON,CA 94588

来源：

MICROSCOPY MICROANALYSIS MICROSTRUCTURES | 1990年 / 1卷 / 5-6期

关键词：

D O I：

10.1051/mmm:0199000105-6044300

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

For an improved exploration of the nanoworld at the atomic level, the implementation of various spectroscopies on an electron microscope column broadens the range of available information. Characterization at the atomic level is now made possible by an efficient combination of STEM probes of small size and high brightness with a parallel array of detectors for the EELS signal. The present paper describes two typical situations in materials science, where this analytical signal (presence of a given edge, change in the fine structures) is used at the nanometer (or subnanometer) scale. The first one is the chemical identification of small clusters of thorium (down to the single atom size) through the occurrence of the O45 edge. The second one is the search for sulphur along isolated dislocation cores within a well characterized grain boundary. Sulphur is not detected but changes in extended fine structures can be related to local variations of crystallographic environment.

引用

页码：443 / 454

页数：12

共 17 条

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