PRECISION OF ELLIPSOMETRIC MEASUREMENT

被引:14
作者
SCHMIDT, E
机构
关键词
D O I
10.1364/JOSA.60.000490
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:490 / &
相关论文
共 7 条
  • [1] ABELES F, 1963, PROGRESS OPTICS 2
  • [2] HEAVENS OS, 1964, PHYS THIN FILMS, V2, P193
  • [3] MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY
    MCCRACKIN, FL
    PASSAGLIA, E
    STROMBERG, RR
    STEINBERG, HL
    [J]. JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY, 1963, A 67 (04): : 363 - +
  • [4] Vasicek A., 1960, OPTICS THIN FILMS
  • [5] VASICEK A, 1957, MERENI VYTVARENI TEN
  • [6] WINTERBOTTOM AB, 1955, 1 ROY NORW SCI SOC R
  • [7] [No title captured]