EVALUATION OF ONIUM SALT CATIONIC PHOTOINITIATORS AS NOVEL DISSOLUTION INHIBITOR FOR NOVOLAC RESIN

被引：32

作者：

ITO, H

FLORES, E

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 09期

关键词：

D O I：

10.1149/1.2096263

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2322 / 2327

页数：6

共 19 条

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LAM, JHW .

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[3] NEW PREPARATION OF TRIARYLSULFONIUM AND TRIARYLSELENONIUM SALTS VIA COPPER(II)-CATALYZED ARYLATION OF SULFIDES AND SELENIDES WITH DIARYLIODONIUM SALTS [J].

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[4]

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[5]

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[7]

HINSBERG WD, 1985, P SOC PHOTO-OPT INST, V539, P6, DOI 10.1117/12.947808

[8]

HOFER DC, 1982, P SOC PHOTO-OPT INST, V334, P196, DOI 10.1117/12.933577

[9] NOVEL POLYMERIC DISSOLUTION INHIBITOR FOR THE DESIGN OF SENSITIVE, DRY ETCH RESISTANT, BASE-DEVELOPABLE RESIST [J].

ITO, H ;

FLORES, E ;

RENALDO, AF .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (09) :2328-2333

[10]

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