FILM THICKNESS MEASUREMENT BY MONITORING METHODS

被引：4

作者：

GREAVES, C

机构：

来源：

关键词：

D O I：

10.1016/S0042-207X(70)80020-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：332 / &

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[2]

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[3]

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[4]

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DEKLERK, J ;

KELLY, EF .

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FISHER, JC ;

GIAEVER, I .

[8]

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[9]

HAASE O, 1957, Z NATURFORSCH PT A, V12, P941

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JOURNAL OF SCIENTIFIC INSTRUMENTS, 1962, 39 (08) :428-&