THE USE OF A POLYMER FILM TO ESTIMATE AFM PROBE PROFILE

被引：13

作者：

GLASBEY, TO ^{[1
]}

BATTS, GN ^{[1
]}

DAVIES, MC ^{[1
]}

JACKSON, DE ^{[1
]}

NICHOLAS, CV ^{[1
]}

PURBRICK, MD ^{[1
]}

ROBERTS, CJ ^{[1
]}

TENDLER, SJB ^{[1
]}

WILLIAMS, PM ^{[1
]}

机构：

[1] KODAK LTD, HARROW HA1 4TY, MIDDX, ENGLAND

来源：

SURFACE SCIENCE | 1994年 / 318卷 / 03期

关键词：

D O I：

10.1016/0039-6028(94)90095-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

During our investigation of the surface morphology of various polyethylene glycol methacrylate copolymers we found that the rapid drying of a chloroform solution of a poly(methyl methacrylate-co-polyethylene glycol methacrylate) polymer resulted in the generation of a surface characterised by many sharp sided holes in a flat polymer matrix, which lead to extensive tip self imaging. By measuring the profiles of these holes (which are of variable size ranging from tens of nanometres to microns in depth), it is possible to estimate the gross tip profile over a wide vertical range in a totally non-destructive manner.

引用

页码：L1219 / L1224

页数：6

共 16 条

[1]

ALLISON DP, 1990, SCANNING MICROSCOPY, V4, P517

[2] PROBING AND INDUCING SURFACE-CHEMISTRY WITH THE STM - THE REACTIONS OF SI(111)-7X7 WITH H2O AND O2 [J].