Z CALIBRATION OF THE ATOMIC-FORCE MICROSCOPE BY MEANS OF A PYRAMIDAL TIP

被引：19

作者：

JENSEN, F

机构：

[1] Mikroelektronik Centeret, DTH, Building 345e

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1993年 / 64卷 / 09期

关键词：

D O I：

10.1063/1.1143873

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A new method for imaging the probe tip of an atomic force microscope cantilever by the atomic force microscope itself (self-imaging) is presented. The self-imaging is accomplished by scanning the probe tip across a sharper tip on the surface. By using a pyramidal probe tip with a very well-defined aspect ratio, this technique provides an excellent z-calibration standard for the atomic force microscope.

引用

页码：2595 / 2597

页数：3

共 15 条

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