INTEGRATED-OPTIC GRATING-SCALE-DISPLACEMENT SENSOR USING LINEARLY FOCUSING GRATING COUPLERS

被引：8

作者：

URA, S

SHINOHARA, M

SUHARA, T

NISHIHARA, H

机构：

[1] Department of Electronic Engineering, Faculty of Engineering, Osaka University of Yamada-Oka 2-1, Suita

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1994年 / 6卷 / 02期

关键词：

D O I：

10.1109/68.275437

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An integrated-optic device was proposed for sensing displacement/position of a grating scale. The sensor is constructed by integrating a glass waveguide, a pair of linearly focusing grating couplers (LFGCs) and a pair of photodiodes (PDs) on a Si substrate. Two beams, radiated by the LFGCs from the sensor, overlap with each other on the grating scale. The beams diffracted by the grating scale interfere on the PDs, and the interference signals vary when the grating scale moves along its grafting vector direction. The device was designed and fabricated and the variation of output photocurrents was experimentally confirmed.

引用

页码：239 / 241

页数：3

共 9 条

[1] INTEGRATED OPTICAL GRATING SCALE READOUT EMPLOYING A DOUBLE GRATING [J].