STUDIES ON GROWTH, STRUCTURE AND COMPOSITION OF UNDOPED AND INDIUM-DOPED THIN-FILMS OBTAINED USING THE PYROSOL METHOD

被引:46
作者
TIBURCIOSILVER, A [1 ]
JOUBERT, JC [1 ]
LABEAU, M [1 ]
机构
[1] INST NATL POLYTECH GRENOBLE,ENSPG,MAT & GENIE PHYS LAB,CNRS,URA 1109,F-38402 ST MARTIN DHERES,FRANCE
关键词
D O I
10.1016/0040-6090(91)90232-M
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Undoped and indium-doped ZnO thin films were deposited by the Pyrosol process onto soda-lime glass substrates. Several precursors and solvents were tested. Only a solution of dihydrated zinc acetate diluted in methanol allowed us to obtain good quality undoped ZnO thin films; indium doping was achieved by adding a saturated solution of indium acetylacetonate diluted in acetylacetone. A strong preferred orientation of grains which changed with deposition temperature and indium doping was observed. The average grain size varied linearly with substrate temperature for undoped ZnO films. The indium content of the films was only lower than that of the solution for high deposition temperatures. Alkali diffusion from the substrate which diminished with substrate temperature and/or indium doping was observed.
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收藏
页码:195 / 214
页数:20
相关论文
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