QUANTITATIVE INFRARED-ANALYSIS OF BOROPHOSPHOSILICATE FILMS USING MULTIVARIATE STATISTICAL-METHODS

被引：81

作者：

HAALAND, DM

机构：

[1] Sandia Natl Lab, Albuquerque, NM,, USA, Sandia Natl Lab, Albuquerque, NM, USA

来源：

ANALYTICAL CHEMISTRY | 1988年 / 60卷 / 11期

关键词：

MATHEMATICAL TECHNIQUES - Least Squares Approximations - SPECTROSCOPY; INFRARED - Applications - STATISTICAL METHODS;

D O I：

10.1021/ac00162a022

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Infrared (IR) spectroscopy can serve as a rapid method for the quantitative analysis of borophosphosilicate glass (BPSG) films on Si wafers for the microelectronics industry. The advantages of using statistically designed calibration sets are emphasized. Classical least-squares (CLS), partial least-squares (PLS), and principal component regression (PCR) methods are all found to provide improved precision over traditional peak-height measurements. The quantitative results from spectral measurements taken in transmission mode at both 0 degree and 60 degree incident angles were also compared.

引用

页码：1208 / 1217

页数：10

共 28 条

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