IONIZED CLUSTER BEAMS - PHYSICS AND TECHNOLOGY

被引:98
作者
YAMADA, I
TAKAOKA, GH
机构
[1] Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo, Kyoto
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 5A期
关键词
CLUSTER; IONIZED CLUSTER BEAM; DEPOSITION; EPITAXY; MIGRATION; LARGE MISFIT; SURFACE MODIFICATION; ELECTRON DEVICE; OPTICAL DEVICE;
D O I
10.1143/JJAP.32.2121
中图分类号
O59 [应用物理学];
学科分类号
摘要
Ionized cluster beam (ICB) deposition has been used to form thin films of metals, insulators, semiconductors and organic materials which have unique characteristics when compared to films formed using other techniques. In addition, the use of gas-phase atoms in the form of accelerated clusters has recently shown promise for surface modification applications. A fundamental understanding of ICB deposition and related techniques requires investigations of (1) the mechanisms which lead to the growth of large vapor phase clusters, (2) techniques for determining the size distribution of large vapor clusters, (3) the initial stages of film nucleation, (4) film growth morphology related to lattice mismatch and ion beam parameters. Clarification of the role of clusters in ICB deposition has been greatly aided by atomic scale imaging by transmission electron microscopy and scanning tunnel microscopy in the early stages of film growth. Emphasis is given to the formation of high-quality, epitaxial metallic films. Several applications of ICB films with respect to microelectronics, optical mirrors, compound materials and organic materials are discussed with emphasis on the special characteristics of ICB films. Applications for gas-cluster processing are reviewed.
引用
收藏
页码:2121 / 2141
页数:21
相关论文
共 66 条
[1]   OPTICAL CHARACTERISTICS OF HIGH-POWER EXCIMER LASER MIRRORS OF SINGLE-CRYSTAL ALUMINUM FILM WITH HIGH REFLECTANCE AND DURABILITY [J].
ADACHI, M ;
IKUNI, S ;
YAMADA, K ;
USUI, H ;
YAMADA, I .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 59 :940-942
[2]  
AIZAWA K, 1989, S REC SEMICONDUCTOR, V37, P85
[3]  
ANDERSON JB, 1974, MOL BEAMS LOW DENSIT, pCH1
[4]  
[Anonymous], 1872, P R SOC EDINB, DOI DOI 10.1017/S0370164600041729
[5]   STRAHLEN AUS KONDENSIERTEN ATOMEN UND MOLEKELN IM HOCHVAKUUM [J].
BECKER, EW ;
BIER, K ;
HENKES, W .
ZEITSCHRIFT FUR PHYSIK, 1956, 146 (03) :333-338
[6]   PHOTOEMISSION-STUDIES OF THE SILICON GOLD INTERFACE [J].
BRAICOVICH, L ;
GARNER, CM ;
SKEATH, PR ;
SU, CY ;
CHYE, PW ;
LINDAU, I ;
SPICER, WE .
PHYSICAL REVIEW B, 1979, 20 (12) :5131-5141
[7]   ION CLUSTER BEAM DEPOSITION OF THIN-FILMS [J].
BROWN, WL ;
JARROLD, MF ;
MCEACHERN, RL ;
SOSNOWSKI, M ;
TAKAOKA, G ;
USUI, H ;
YAMADA, I .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 59 :182-189
[8]  
DAHMEN U, 1990, 13TH P SPEC SEM ION, P53
[9]  
DAHMEN U, 1988, NOV MRS FALL M BOST
[10]  
DARRATT LG, 1954, PHYS REV, V95, P359