TRACE-ANALYTICAL METHODS FOR MONITORING CONTAMINATIONS IN SEMICONDUCTOR-GRADE SI MANUFACTURING

Generating systematic data on incoming materials, processes, production environments and products by contamination monitoring and analyis is the key element of quality assurance in semiconductor fabrication. To be able to match the analytical capabilities to the requirements of improving materials and processes, the level of sophistication of contamination monitoring and analysis systems must be higher than the expected demands in the fabrication line. The accuracy of each analytical method has to be cross-checked by different independent techniques. Accuracy, precision, power of detection, analysis time and expenses should always be tailored to the particular case. All monitoring methods must run under statistical process control. The methods described meet the analytical requirements of the near future in semiconductor grade silicon manufacturing.