MOLYBDENUM FILMS AS PARTIAL DIFFUSION MASKS IN MOS PROCESSING

被引：3

作者：

ELHOSHY, A

BROWN, DM

ENGELER, WE

机构：

来源：

APPLIED PHYSICS LETTERS | 1970年 / 17卷 / 06期

关键词：

D O I：

10.1063/1.1653391

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：261 / &

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