INFRARED DETECTOR ARRAYS BY RF SPUTTERING

被引:11
作者
CORSI, C
ALFIERI, I
PETROCCO, G
机构
来源
INFRARED PHYSICS | 1972年 / 12卷 / 04期
关键词
D O I
10.1016/0020-0891(72)90026-7
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
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页码:271 / &
相关论文
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