PHASE-TRANSITION EFFECTS IN PLASMA-POLYMERIZED ORGANOSILICON FILMS

被引:5
作者
TYCZKOWSKI, J
KAZIMIERSKI, P
机构
[1] Polish Acad of Sciences, Lodz, Pol, Polish Acad of Sciences, Lodz, Pol
来源
JOURNAL OF MACROMOLECULAR SCIENCE-PHYSICS | 1987年 / B26卷 / 02期
关键词
PLASMAS - Applications - SILICON COMPOUNDS - Thin Films;
D O I
10.1080/00222348708248066
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
Some detailed investigations recently carried out on plasma-polymerized organosilicon films have revealed a number of phenomena which may be related to a phase transition taking place at ca. 270 K. The existence of this effect is confirmed by measurements of the temperature dependence of the thermal expansion coefficient of these films, by DSC measurements, and by measurements of the temperature dependence of the dielectric constant. It was found that the observed phase transition effect appears to be related to the presence of water molecules in the film volume.
引用
收藏
页码:217 / 226
页数:10
相关论文
共 11 条
[1]  
BOENIG HV, 1984, ADV LOW TEMPERATURE
[2]  
BRODSKY MH, 1979, AMORPHOUS SEMICONDUC, pCH1
[3]  
MAISSEL LI, 1970, HDB THIN FILM TECHNO, pCH11
[4]  
TIMMERMANS CJ, 1985, 7TH P INT S PLASM CH
[5]  
Tyczkowski J., 1985, 5th International Symposium on Electrets (ISE 5) (Cat. No. 85CH2166-7), P340
[6]   PHOTOINJECTION INTO PLASMA-POLYMERIZED THIN ORGANO-SILICON FILMS .2. THE STRUCTURE OF ENERGY-LEVELS [J].
TYCZKOWSKI, J ;
KRYSZEWSKI, M .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1984, 17 (10) :2053-2064
[7]  
TYCZKOWSKI J, 1984, J APPL POLYM SCI APP, V38, P149
[8]  
TYCZKOWSKI J, 1986, 2ND P INT C COND BRE
[9]  
WIGHTMAN JP, 1969, ADV CHEM SER, V80, P322
[10]   THERMAL-DECOMPOSITION OF PLASMA-POLYMERIZED ORGANO-SILICON THIN-FILMS [J].
WROBEL, AM ;
KOWALSKI, J ;
GREBOWICZ, J ;
KRYSZEWSKI, M .
JOURNAL OF MACROMOLECULAR SCIENCE-CHEMISTRY, 1982, A17 (03) :433-452