USE OF IMPLANT ISOLATION FOR FABRICATION OF VERTICAL CAVITY SURFACE-EMITTING LASER-DIODES

被引:29
作者
TAI, K
FISCHER, RJ
WANG, KW
CHU, SNG
CHO, AY
机构
关键词
D O I
10.1049/el:19891102
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1644 / 1645
页数:2
相关论文
共 11 条
  • [1] OXYGEN-IMPLANTED DOUBLE-HETEROJUNCTION GAAS-GAALAS INJECTION LASERS
    BLUM, JM
    MCGRODDY, JC
    MCMULLIN, PG
    SHIH, KK
    SMITH, AW
    ZIEGLER, JF
    [J]. IEEE JOURNAL OF QUANTUM ELECTRONICS, 1975, QE11 (07) : 413 - 418
  • [2] (AL,GA)AS DOUBLE-HETEROSTRUCTURE LASERS - COMPARISON OF DEVICES FABRICATED WITH DEEP AND SHALLOW PROTON-BOMBARDMENT
    DIXON, RW
    JOYCE, WB
    [J]. BELL SYSTEM TECHNICAL JOURNAL, 1980, 59 (06): : 975 - 985
  • [3] PROTON-BOMBARDMENT FORMATION OF STRIPE-GEOMETRY HETEROSTRUCTURE LASERS FOR 300 K CW OPERATION
    DYMENT, JC
    NORTH, JC
    MILLER, BI
    RIPPER, JE
    DASARO, LA
    [J]. PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1972, 60 (06): : 726 - &
  • [4] FISCHER RJ, IN PRESS APPL PHYS L
  • [5] IBARAKI A, 1989, JUL P INT C INT OPT
  • [6] LOW-THRESHOLD ELECTRICALLY PUMPED VERTICAL-CAVITY SURFACE-EMITTING MICROLASERS
    JEWELL, JL
    SCHERER, A
    MCCALL, SL
    LEE, YH
    WALKER, S
    HARBISON, JP
    FLOREZ, LT
    [J]. ELECTRONICS LETTERS, 1989, 25 (17) : 1123 - 1124
  • [7] ROOM-TEMPERATURE CONTINUOUS WAVE LASING CHARACTERISTICS OF A GAAS VERTICAL CAVITY SURFACE-EMITTING LASER
    KOYAMA, F
    KINOSHITA, S
    IGA, K
    [J]. APPLIED PHYSICS LETTERS, 1989, 55 (03) : 221 - 222
  • [8] DEUTERON BOMBARDMENT OF GALLIUM-ARSENIDE FOR DEVICE ISOLATION
    STEEPLES, K
    SAUNDERS, IJ
    SMITH, JG
    [J]. ELECTRON DEVICE LETTERS, 1980, 1 (05): : 72 - 74
  • [9] TAI K, IN PRESS APPL PHYS L
  • [10] TAI K, 1989, JUN DEV RES C BOST