EPITAXIAL GROWTH OF SIC USING AL AS AN ACCELERATOR

被引:5
作者
YAMADA, S
KUMAGAWA, M
机构
关键词
D O I
10.1016/0022-0248(71)90247-8
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
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页码:309 / &
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