MICROANALYSIS OF SURFACES BY SCANNING WITH CHARGED PARTICLE BEAMS

被引：27

作者：

PIERCE, TB

PECK, PF

CUFF, DRA

机构：

[1] Analytical Sciences Division, UKAEA Research Group, Atomic Energy Research Establishment, Harwell, Didcot, Berkshire

来源：

NUCLEAR INSTRUMENTS & METHODS | 1969年 / 67卷 / 01期

关键词：

D O I：

10.1016/0029-554X(69)90533-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Particle beams produced in high-voltage accelerators have been reduced in area by collimation and used to irradiate localised regions of a sample surface. By measuring elastically scattered particles or prompt γ-radiation, the change in thickness of a surface layer or the variation in elemental composition across several different samples has been examined. © 1969.

引用

页码：1 / &

共 24 条

[1]

AMSEL G, 1962, PHYS CHEM SOLIDS, V23, P1707

[2] USE OF CHARGED PARTICLES FROM A 2-MEGAVOLT VAN DE GRAAFF ACCELERATOR FOR ELEMENTAL SURFACE ANALYSIS [J].

ANDERS, OU .

ANALYTICAL CHEMISTRY, 1966, 38 (11) :1442-&

[3]

BARRINGTON AE, ANAL CHEM, V7, P243

[4]

BARRINGTON AE, PROGRESS NUCLEAR E 9

[5]

ELION HA, PROGRESS NUCLEA 9 ED

[6]

GARTON FWJ, 1965, P SAC C NOTTINGHAM, P65

[7]

GELLI D, 1965, APPLIED MATERIALS RE, V4, P107

[8]

HOLM DM, 1962, LADC7319 USAEC REP

[9]

KOLTHOFF IM, TREATISE ANALYT 1 ED, V5, P3173

[10]

KOLTHOFF IM, TREATISE ANALYT 1 ED, V4, P2075

← 1 2 3 →