MICROANALYSIS OF SURFACES BY SCANNING WITH CHARGED PARTICLE BEAMS

被引：27

作者：

PIERCE, TB

PECK, PF

CUFF, DRA

机构：

[1] Analytical Sciences Division, UKAEA Research Group, Atomic Energy Research Establishment, Harwell, Didcot, Berkshire

来源：

NUCLEAR INSTRUMENTS & METHODS | 1969年 / 67卷 / 01期

关键词：

D O I：

10.1016/0029-554X(69)90533-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Particle beams produced in high-voltage accelerators have been reduced in area by collimation and used to irradiate localised regions of a sample surface. By measuring elastically scattered particles or prompt γ-radiation, the change in thickness of a surface layer or the variation in elemental composition across several different samples has been examined. © 1969.

引用

页码：1 / &

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