LARGE-SCALE MAGNETRONS FOR SPUTTERING OF THICK COCR AND NIFE TARGETS

被引：9

作者：

KUKLA, R

KIESER, J

MAYR, M

机构：

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1987年 / 23卷 / 01期

关键词：

D O I：

10.1109/TMAG.1987.1064742

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：137 / 139

页数：3

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