HIGH-RATE SPUTTERING OF COCR WITH LARGE-SCALE MAGNETRONS - DEPENDENCE OF MAGNETIC-PROPERTIES ON SPUTTERING PARAMETERS

被引：5

作者：

LUDWIG, R

KASTNER, K

KUKLA, R

MAYR, M

机构：

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1987年 / 23卷 / 01期

关键词：

D O I：

10.1109/TMAG.1987.1064811

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：94 / 96

页数：3

共 13 条

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ISHIO, S ;

TAKAHASHI, M .

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[3]

IWASAKAI S, 1980, IEEE T MAG, V6, P1111

[4]

KUKLA R, 1986, IN PRESS IEEE T MAG

[5]

Matsuoka M., 1984, Electronics and Communications in Japan, V67, P86, DOI 10.1002/ecja.4400671211

[6]

MAYR M, 1986, IN PRESS IEEE T MAG

[7] PROPERTIES OF HIGH-RATE SPUTTERED PERPENDICULAR RECORDING MEDIA [J].

OUCHI, K ;

IWASAKI, S .

JOURNAL OF APPLIED PHYSICS, 1985, 57 (08) :4013-4015

[8]

ROLL K, 1984, IEEE T MAG, V6, P771

[9]

ROLL K, 1984, IEEE T MAG, V6, P63

[10]

SCHWARZ W, 1985, APR P SVC PHIL

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