PLASMA POLYMERIZATION OF METAL ACETYLACETONATES AND APPLICATION FOR GAS SENSOR DEVICES

Plasma polymerization of five metal acetylacetonates (MAcAc), aluminium acetylacetonate (AlAcAc), copper acetylacetonate (CuAcAc), titanium acetylacetonate (TiAcAc), zinc acetylacetonate (ZnAcAc), and magnesium acetylacetonate (MgAcAc), were investigated for the application of CO gas sensor devices. Plasma polymerization deposited thin films with metal elements as well as carbon and oxygen elements. The polymer deposition rate in the plasma polymerization was a function of the rf power, the system pressure, and the nature of the MAcAc. The elemental composition of the deposited films was fairly different from that of the starting materials, MAcAc. The complexing bonds of the MAcAc between acetylacetone and the metal element occurred in the plasma zone. The cleavage was closely related to the delocalization of electrons on the complexing of the MAcAc. The plasma polymer films prepared from TiAcAc and ZnAcAc in the presence of Pt catalyst showed a response toward CO gas. The plasma polymer films, especially prepared from TiAcAc, are potential materials for a CO sensor device with both sensitivity and selectivity.