PHYSICAL AND ELECTRO-CHEMICAL PROPERTIES OF HIGH-RATE ION-BEAM SPUTTERED FE FILMS

被引:7
作者
LO, J [1 ]
FRANCO, L [1 ]
HUANG, TC [1 ]
WU, TW [1 ]
MILLER, D [1 ]
CAMPBELL, R [1 ]
机构
[1] IBM CORP,DIV RES,ALMADEN RES CTR,SAN JOSE,CA 95120
关键词
D O I
10.1109/20.92341
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:3081 / 3083
页数:3
相关论文
共 11 条
[1]   MAGNETIC-PROPERTIES OF MULTILAYERED FE-C FILM FORMED BY DUAL ION-BEAM SPUTTERING [J].
KOBAYASHI, T ;
NAKATANI, R ;
OTOMO, S ;
KUMASAKA, N .
IEEE TRANSACTIONS ON MAGNETICS, 1987, 23 (05) :2746-2748
[2]   MAGNETIC AND STRUCTURAL-PROPERTIES OF HIGH-RATE DUAL ION-BEAM SPUTTERED NIFE FILMS [J].
LO, J ;
HWANG, C ;
HUANG, TC ;
CAMPBELL, R ;
ALLEE, D .
JOURNAL OF APPLIED PHYSICS, 1987, 61 (08) :3520-3525
[3]  
MANSFELD F, 1976, ADV CORROSION SCI TE, V6
[4]   PROPERTIES OF ION-BEAM-SPUTTERED NI/FE ARTIFICIAL LATTICE FILM [J].
NAGAI, Y ;
SENDA, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (09) :L1514-L1516
[5]   WELL-DEFINED UNIAXIAL ANISOTROPY IN IRON FILM FORMED BY ION-BEAM SPUTTERING [J].
NAGAI, Y ;
TAGO, A ;
YANAGISAWA, K ;
TOSHIMA, T .
JOURNAL OF APPLIED PHYSICS, 1987, 61 (08) :3841-3843
[6]  
NAGAI Y, 1987, JPN J APPL PHYS, pL1131
[7]  
NAGAKUBO N, 1987, 32ND 3M ANN C
[8]   DEPOSITION OF RUST PROOF IRON THIN-FILMS WITH SOFT MAGNETIC-PROPERTIES BY DUAL ION-BEAM SPUTTERING [J].
NAOE, M ;
YAMAGA, M ;
TERADA, N .
IEEE TRANSACTIONS ON MAGNETICS, 1985, 21 (05) :1900-1902
[9]  
OOTOMO S, 1987, IEEE T MAGN, V23, P2740
[10]  
TAM AC, 1988, INT MAG 3M C